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Large Substrate UVLED Exposure System

ALE/2 - UV-LED Exposure System

Product Advantages and Features

  • Built-in solutions for maximum exposure efficiency and performance
  • Up to 70W i-line exposure (CWL 365 nm)
  • Up to 80W broadband exposure (350-450 nm)
  • Closed loop control of light output
  • LED Process Stability and TCO Advantages
  • No external cooling required
  • Mercury-free! Energy-saving and environmentally friendly LED light source
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LED light source to replace ultra-high-power mercury lamps

ALE/2 exposure light source provides350-450nmNarrowband and broadband UV radiation output in the range.

 

The ALE/2 has a narrowband output power of up to 70W The broadband output power is up to 80W The lamp is a complete replacement for high power discharge mercury lamps.

Distributed Design Integration

ALE/2 Exposure Light Source FollowDistributed Design ApproachUsuallyConsists of a control subsystem (CSS) and a separate exposure subsystem (ESS).The ESS can be directly connected to the exposure system.

Control Subsystem (CSS)

  • Can be used as a 4U 19-inch rack mount system
  • Includes power supply, cooling system and external interfaces

Exposure Subsystem (ESS)

  • Innovative optical design for direct integration into exposure equipment
  • Includes i, h and g line emitters, and LED drivers    

Basic Parameter Information

365 / 405 / 436 nm

Radiation [W]

 

ALE2

i-line
CWL 365 nm

Broadband
350 - 450 nm

Standard Mode

35

80

performance mode

38

90

 

mercury arc lamp

 

1,000 W

20

40

5,000 W

75

150

4 NUV-LEDs: 365 nm

Radiation [W]

 

ALE2

i-line
CWL 365 nm

Standard Mode

70

performance mode

80

 

mercury arc lamp

 

1,000 W

20

5,000 W

75

 

Center emitted wavelengths: 367.5±2.5 nm, 387.5±2.5 nm, 402.5±2.5 nm, and 435.0±2.5 nm.

Output power may vary ±10%.

System Parameters and Specifications

Wavelength Selection

4 LEDs with CWL 365 nm, 385 nm, 405 nm, and 436 nm

Numerical Aperture

With standard concentrator: NA 0.3 (2α ~35°)

Output Control

+ Single LED power management with presets
+ High Resolution Intensity Adjustment (10-100%)
+ LED rise time less than 1 ms
+ Continuous monitoring of fiber output and feedback control

communication interface

+ Discrete PLC interface (TTL)
+ USB (Serial)
+ Ethernet/Modbus (optional)

Thermal Management

+ Liquid cooling of internal radiators
+ optional thermoelectric cooler (required for performance mode operation)

Size (WHD)

ESS 21 X 21 X 36 cm (8.3 X 8.3 X 14.2″)
CSS (Rack) 44 X 18 X 37 cm (17.3 X 7.1 X 14.6″)

weights

ESS 4 kg (9 lbs)
CSS (Rack) 10 kg (22 lbs)

Battery supply

110 - 240 VAC / 50 - 60 Hz / 1,500 W

 

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